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Quarz >> Werkzeuge >> EN - Ovality Collapse Calculator
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How To Use This Calculator |
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Furnaces used for high temperature process in the semiconductor industry use quartz tubes as the high purity chamber. When the quartz tube is oriented horizontally, a common issue is the collapse of the round tube to an oval cross-section. Some types of quartz and some sizes of quartz resist this collapse better than others. This calculator is used to predict the relative difference in collapse between different types of quartz and different sizes. |
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Abstract: This calculator is applicable for the temperatures from 1150°C to 1210°C. This range was selected for experimentation because it represents the range commonly used for high temperature diffusion process. The same collapse phenomena exist outside this range. At higher temperatures the collapse will be greater while at lower temperatures the collapse will be less. |
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| Reasonable care must be taken in handling and use to protect glass (quartz) surfaces from scratches, abrasions, pits or digs that can act as break sources. Glass under stress will fail due to a break source. Therefore, surface preparation of glass exposed to thermal or mechanical stress is critical. The above calculations are relative estimates only. The estimated value should not be used as a prediction of the amount of collapse in a particular system. The estimated value should only be used to make relative comparisons between two different tubes. | |
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